2D silicon/ferroelectric liquid crystal spatial light modulators

نویسندگان

  • Timothy J. Drabik
  • Albert H. Titus
  • Mark A. Handschy
  • David Banas
  • Stephen D. Gaalema
  • David J. Ward
چکیده

We have developed a spatial light modulator technology based on foundry silicon fabrication processes. This technology employs a thin, ferroelectric liquid crystal light-modulating layer at the substrate's surface, producing electrically addressed display devices with resolutions up to 256x256 and frame rates up to 10 kHz. We have also fabricated optically addressed smart-pixel arrays for low-level image processing. Performance has advanced rapidly due to design innovations and effective use of modern process features.

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عنوان ژورنال:
  • IEEE Micro

دوره 15  شماره 

صفحات  -

تاریخ انتشار 1995